Share Email Print
cover

Proceedings Paper

Nanocrystalline diamond films: new material for IR optics
Author(s): Vitali I. Konov; E. D. Obraztsova; Sergej M. Pimenov; Victor G. Ralchenko; Andrey A. Smolin; A. V. Khomich; Vladimir I. Polyakov; A. I. Rukovishnikov; Polievet I. Perov; E. N. Loubnin
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Thin nanocrystalline diamond films promising for IR optical applications were grown on Si substrates from methane-hydrogen gas mixture in a DC arc plasma CVD reactor. Three stages for the synthesis of the highly smooth noncrystalline diamond films are important: (i) substrate pretreatment with ultrafine diamond powder, (ii) excimer laser irradiation of seeded substrates, and (iii) two-step deposition process. A correlation between optical properties of the films and growth conditions has been established by means of Raman spectroscopy, spectroscopic ellipsometry and optical transmission spectroscopy techniques. Surface roughness, which was Ra equals 8 - 40 nm for the 1 micrometers thick films, significantly decreased the transmission in the visible because of light scattering, but it had a negligible effect in the IR range. The films are transparent in the IR and have optical constants n equals 2.34-2.36 and k equals 0.005- 0.03. The hydrogen incorporation in the films in amounts up to 1.5% have been deduced from intensity of C-H absorption band around 2900 cm(superscript -1.

Paper Details

Date Published: 14 July 1995
PDF: 9 pages
Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); doi: 10.1117/12.213708
Show Author Affiliations
Vitali I. Konov, General Physics Institute (Russia)
E. D. Obraztsova, General Physics Institute (Russia)
Sergej M. Pimenov, General Physics Institute (Russia)
Victor G. Ralchenko, General Physics Institute (Russia)
Andrey A. Smolin, General Physics Institute (Russia)
A. V. Khomich, Institute of Radio Engineering and Electronics (Russia)
Vladimir I. Polyakov, Institute of Radio Engineering and Electronics (Russia)
A. I. Rukovishnikov, Institute of Radio Engineering and Electronics (Russia)
Polievet I. Perov, Institute of Radio Engineering and Electronics (Russia)
E. N. Loubnin, Institute of Physical Chemistry (Russia)


Published in SPIE Proceedings Vol. 2428:
Laser-Induced Damage in Optical Materials: 1994
Harold E. Bennett; Arthur H. Guenther; Mark R. Kozlowski; Brian Emerson Newnam; M. J. Soileau, Editor(s)

© SPIE. Terms of Use
Back to Top