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Proceedings Paper

Integrated transducer systems
Author(s): Marek Syrzycki; M. Parameswaran; Glenn H. Chapman
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Paper Abstract

In the paper we discuss possible solutions to problems pertaining the implementation of integrated transducer systems, based on examples of WSI image transducers, magnetic field sensors and tactile sensors arrays, as well as arrays of chemical sensors. We also present the issues common to large area transducer arrays, such as building-in redundancy into WSI transducer arrays, and frequency domain circuits for the future communication pathway in integrated transducer systems. Advantages of standard CMOS technology, enhanced with various post-fabrication processes such as silicon micromachining and laser linking, are also stressed.

Paper Details

Date Published: 30 June 1995
PDF: 14 pages
Proc. SPIE 2634, Optoelectronic and Electronic Sensors, (30 June 1995); doi: 10.1117/12.213135
Show Author Affiliations
Marek Syrzycki, Simon Fraser Univ. (Canada)
M. Parameswaran, Simon Fraser Univ. (Canada)
Glenn H. Chapman, Simon Fraser Univ. (Canada)


Published in SPIE Proceedings Vol. 2634:
Optoelectronic and Electronic Sensors
Ryszard Jachowicz; Zdzislaw Jankiewicz, Editor(s)

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