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Proceedings Paper

Fully automated mask/reticle production factory
Author(s): Osamu Tsubakida; T. Ban; T. Kojima; Akira Morishige; T. Yoshizawa
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Paper Abstract

Recently, very importance has been placed on the quality, delivery, and production cost of masks/reticles as factors relating to the fabrication of high-density devices. These factors have a significant bearing on the success in the device business. In addition, quality requirements for masks/reticles are becoming more and more tightening. To fulfill these requirements, it has been considered necessary to automate production processes. Automation of mask/reticle production has been difficult because the market is small and the development of such automation has been expensive. Therefore, it has been recognized that old-type mask/reticle factories must be turned into automated factories at inexpensively and efficiently.

Paper Details

Date Published: 3 July 1995
PDF: 11 pages
Proc. SPIE 2512, Photomask and X-Ray Mask Technology II, (3 July 1995); doi: 10.1117/12.212809
Show Author Affiliations
Osamu Tsubakida, Fujitsu Ltd. (Japan)
T. Ban, Fujitsu Ltd. (Japan)
T. Kojima, Fujitsu Ltd. (Japan)
Akira Morishige, Fujitsu Ltd. (Japan)
T. Yoshizawa, Fujitsu Ltd. (Japan)

Published in SPIE Proceedings Vol. 2512:
Photomask and X-Ray Mask Technology II
Hideo Yoshihara, Editor(s)

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