Share Email Print

Proceedings Paper

Characterization of microvibrations by speckle interferometry
Author(s): Roland Hoefling; Volkmar Liebig; Claus-Dieter Schmidt
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Digital speckle pattern interferometry is used to investigate the vibration behavior of silicon micromembranes. Mode shapes have been mapped up to the 20th natural frequency for squared membranes with millimeter and submillimeter dimensions. Experimental results are found in very good agreement with analytical and finite element analyses. Assigning vibration modes to the series of natural frequencies measured allows to get information about Young's modulus or membrane thickness, respectively.

Paper Details

Date Published: 23 June 1995
PDF: 6 pages
Proc. SPIE 2545, Interferometry VII: Applications, (23 June 1995); doi: 10.1117/12.212646
Show Author Affiliations
Roland Hoefling, Fraunhofer Institute for Forming Technology and Machine Tools (Germany)
Volkmar Liebig, Fraunhofer Institute for Nondestructive Testing (Germany)
Claus-Dieter Schmidt, Fraunhofer Institute for Forming Technology and Machine Tools (Germany)

Published in SPIE Proceedings Vol. 2545:
Interferometry VII: Applications
Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner, Editor(s)

© SPIE. Terms of Use
Back to Top