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Proceedings Paper

Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films
Author(s): Gerry M. Blumenstock; Ritva A. M. Keski-Kuha; Marshal L. Ginter
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Paper Abstract

Ion-beam-deposited boron carbide thin films have been produced and evaluated as normal- incidence, reflective coatings in the extreme ultraviolet. Reflectances of over 28% were obtained for wavelengths longer than 58 nm and as high as 38.6% at 92 nm, for a freshly deposited coating. Optical constants of sputtered boron carbide were calculated from experimental observations using the reflectance-versus-angle method. X-ray photoelectron spectroscopy analysis of the deposited film was performed in order to investigate its chemical composition and effects on the long-term stability of the coating's reflectivity.

Paper Details

Date Published: 20 June 1995
PDF: 7 pages
Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); doi: 10.1117/12.212622
Show Author Affiliations
Gerry M. Blumenstock, NASA Goddard Space Flight Ctr. (United States)
Ritva A. M. Keski-Kuha, NASA Goddard Space Flight Ctr. (United States)
Marshal L. Ginter, Univ. of Maryland/College Park (United States)

Published in SPIE Proceedings Vol. 2515:
X-Ray and Extreme Ultraviolet Optics
Richard B. Hoover; Arthur B. C. Walker Jr., Editor(s)

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