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Proceedings Paper

Hard and soft x-ray study of the correlation between substrate quality and multilayer performance for Co/C coating produced by electron beam evaporation using ion polishing
Author(s): Salim Abdali; Finn Erland Christensen; Eberhard Adolf Spiller; Eric Louis; Harm-Jan Voorma
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Paper Abstract

Polished silicon crystals, lacquered aluminum foil, and float glass substrates with respect to surface roughness. Co/C multilayers were then deposited by electron-beam evaporation with in situ monitoring x-ray signal and ion polishing (Kr+) for the metal layer. The specular as well as the transverse scan have demonstrated different qualities, influenced by the different substrates. The investigations were performed with both hard x-ray (8.05 keV) as well as soft x-ray (0.25 keV). The reflectivity varies up to factor 3 between the best and the worst of these substrates. The results of these investigations and a comparison between the coating performances are discussed.

Paper Details

Date Published: 20 June 1995
PDF: 6 pages
Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); doi: 10.1117/12.212620
Show Author Affiliations
Salim Abdali, Danish Space Research Institute (Denmark)
Finn Erland Christensen, Danish Space Research Institute (Denmark)
Eberhard Adolf Spiller, Technical Univ. of Denmark (Denmark)
Eric Louis, FOM-Institute for Plasma Physics Rijnhuizen (Netherlands)
Harm-Jan Voorma, FOM-Institute for Plasma Physics Rijnhuizen (Netherlands)


Published in SPIE Proceedings Vol. 2515:
X-Ray and Extreme Ultraviolet Optics
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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