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Proceedings Paper

Schwarzschild microscope at the wavelength of 18 nm using a laser-produced plasma source
Author(s): Zhanshan Wang; Jianlin Cao; Bo Chen; Yueying Ma; Junping Zhang; Xingdan Chen
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Paper Abstract

The design , construction and imaging experiments of a soft X-ray microscope which consists of acompact laser-produced plasma source (LPPS) , as well as a multilayer coated spherical condenser, and Schwarzschild optics are presented. The Schwarzschild optics was designed for numerical aperture of 0. 1 and magnification of 10. For the working wavelength of 18 nm calculations show that the resolution is expected to be 0.2im. We designed a 41 layer Mo/Si multilayer coatings of throughput centered at l8nm, and these coatings were deposited by magnetron sputtering. We put a Al/C multilayer filter in front of the image to block thelong wavelength radiation. The object on the primary experiments is a piece of Cu mesh of 55 pair lines/mm witha opening of 5m and bar width of 3im. The backlit mesh image were taken on Kodak X-ray film. The first lot of experiment data show that a spatial resolution better than 1im was obtained. Key words : Schwarzschild Optics , Soft X-Ray Microscope , Multilayer mirrors.

Paper Details

Date Published: 20 June 1995
PDF: 8 pages
Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); doi: 10.1117/12.212619
Show Author Affiliations
Zhanshan Wang, Changchun Institute of Optics and Fine Mechanics (China)
Jianlin Cao, Changchun Institute of Optics and Fine Mechanics (China)
Bo Chen, Changchun Institute of Optics and Fine Mechanics (China)
Yueying Ma, Changchun Institute of Optics and Fine Mechanics (China)
Junping Zhang, Changchun Institute of Optics and Fine Mechanics (China)
Xingdan Chen, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 2515:
X-Ray and Extreme Ultraviolet Optics
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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