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Proceedings Paper

Optical behavior values of substrates, single films, and two film combinations in the x-ray region
Author(s): Michele Wilson McColgan; Muamer Zukic; Jong Ho Park; Douglas G. Torr; Joseph Pedulla
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Paper Abstract

Optical constant determination of thin films is critical to the design of x-ray multilayers. In the x-ray region, surface roughness, interfacial roughness, interdiffusion, volume anisotropies, etc. all act to reduce the reflectance. Reflectance measurements were taken at NIST in Gaithersburg, MD. From these measurements the optical behavior results of a substrate, single films and two film combinations were determined by best fitting the measured reflectance values as a function of the angles of incidence with a functional form based on the theoretical reflectance as a function of the optical constants. By using these new optical constants in a multilayer design, the performance of a multilayer can be predicted.

Paper Details

Date Published: 20 June 1995
PDF: 12 pages
Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); doi: 10.1117/12.212586
Show Author Affiliations
Michele Wilson McColgan, Univ. of Alabama in Huntsville (United States)
Muamer Zukic, Univ. of Alabama in Huntsville (United States)
Jong Ho Park, Univ. of Alabama in Huntsville (United States)
Douglas G. Torr, Univ. of Alabama in Huntsville (United States)
Joseph Pedulla, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 2515:
X-Ray and Extreme Ultraviolet Optics
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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