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Proceedings Paper

Investigation of a beam divergency in Kumakhov lenses
Author(s): Svetlana V. Nikitina; Alexandr S. Sherbakov; Andrey N. Nikitin
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Paper Abstract

The experimental results on spatial redistribution of radiation density for quasiparallel beams after Kumakhov lens are presented. The possibility of using these results in the diffractometry and x-ray lithography are discussed.

Paper Details

Date Published: 15 June 1995
PDF: 7 pages
Proc. SPIE 2519, X-Ray and Ultraviolet Sensors and Applications, (15 June 1995); doi: 10.1117/12.211903
Show Author Affiliations
Svetlana V. Nikitina, Institute for Roentgen Optical Systems (Russia)
Alexandr S. Sherbakov, Institute for Roentgen Optical Systems (Russia)
Andrey N. Nikitin, Institute for Roentgen Optical Systems (Russia)


Published in SPIE Proceedings Vol. 2519:
X-Ray and Ultraviolet Sensors and Applications
Richard B. Hoover; Mark Bennett Williams, Editor(s)

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