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Proceedings Paper

QUASI: a qualitative analysis of surface and interface program for microelectronic materials processing
Author(s): Su-Shing Chen
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Paper Abstract

Qualitative simulation is a technique of artificial intelligence for the qualitative description of mechanism and the representation of incomplete knowledge of the structure and behavior in qualitative physics. Although quantitative simulation has been the main analytical tool in microelectronic materials processing, it is not adequate for real-time process/equipment monitoring and control. Qualitative simulation and modeling can be directly used in process monitoring/control expert systems and any part of CAD/CAE/CAT automation. The qualitative structure and behavior descriptions can be encoded directly as expert knowledge, and moreover used for model-based reasoning.

Paper Details

Date Published: 1 January 1990
PDF: 12 pages
Proc. SPIE 1293, Applications of Artificial Intelligence VIII, (1 January 1990); doi: 10.1117/12.21149
Show Author Affiliations
Su-Shing Chen, Univ. of North Carolina/Charlotte (United States)


Published in SPIE Proceedings Vol. 1293:
Applications of Artificial Intelligence VIII
Mohan M. Trivedi, Editor(s)

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