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Proceedings Paper

Application of machine learning techniques to semiconductor manufacturing
Author(s): Keki B. Irani; Jie Cheng; Usama M. Fayyad; Zhaogang Qian
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Paper Details

Date Published: 1 January 1990
PDF: 10 pages
Proc. SPIE 1293, Applications of Artificial Intelligence VIII, (1 January 1990); doi: 10.1117/12.21147
Show Author Affiliations
Keki B. Irani, Univ. of Michigan (United States)
Jie Cheng, Univ. of Michigan (United States)
Usama M. Fayyad, Univ. of Michigan (United States)
Zhaogang Qian, Univ. of Michigan (United States)


Published in SPIE Proceedings Vol. 1293:
Applications of Artificial Intelligence VIII
Mohan M. Trivedi, Editor(s)

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