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Proceedings Paper

Micromanipulators for automatic wafer probing
Author(s): Ramanamurthy V. Dantu; Nikitas J. Dimopoulos; R. V. Patel; Asim J. Al-Khalili
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Paper Details

Date Published: 1 January 1990
PDF: 12 pages
Proc. SPIE 1293, Applications of Artificial Intelligence VIII, (1 January 1990); doi: 10.1117/12.21121
Show Author Affiliations
Ramanamurthy V. Dantu, Concordia Univ. (Canada)
Nikitas J. Dimopoulos, Univ. of Victoria (Canada)
R. V. Patel, Concordia Univ. (Canada)
Asim J. Al-Khalili, Concordia Univ. (Canada)

Published in SPIE Proceedings Vol. 1293:
Applications of Artificial Intelligence VIII
Mohan M. Trivedi, Editor(s)

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