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Proceedings Paper

Submicrometer feature analysis using optical Gabor transforms
Author(s): Michael Friedmann; Joseph Shamir
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Paper Abstract

A particular form of the Gabor transform is optically implemented using a scanning Gaussian beam. The optical Gabor transform is then used to analyze the field diffracted by targets with features comparable to the wavelength of the incident radiation. Computer simulations and experimental results demonstrate that the optical Gabor transform is a powerful tool for the identification and measurement of wavelength and sub-wavelength features.

Paper Details

Date Published: 6 June 1995
PDF: 7 pages
Proc. SPIE 2426, 9th Meeting on Optical Engineering in Israel, (6 June 1995); doi: 10.1117/12.211198
Show Author Affiliations
Michael Friedmann, Technion--Israel Institute of Technology (Israel)
Joseph Shamir, Technion--Israel Institute of Technology (Israel)


Published in SPIE Proceedings Vol. 2426:
9th Meeting on Optical Engineering in Israel
Itzhak Shladov; Yitzhak Wiessman; Natan Kopeika, Editor(s)

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