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Proceedings Paper

Group technology in multichamber and in-situ processing
Author(s): Su-Shing Chen
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Paper Abstract

Group technology is a useful technique of general manufacturing systems that provides production efficiency in fabrication of similar but not identical devices on the same machines. In this paper, we extend this concept to computer-integrated- manufacturing of custom VLSI semiconductor devices, particularly in the area of multichamber and in-situ processing.

Paper Details

Date Published: 1 January 1990
PDF: 6 pages
Proc. SPIE 1293, Applications of Artificial Intelligence VIII, (1 January 1990); doi: 10.1117/12.21109
Show Author Affiliations
Su-Shing Chen, Univ. of North Carolina/Charlotte (United States)


Published in SPIE Proceedings Vol. 1293:
Applications of Artificial Intelligence VIII
Mohan M. Trivedi, Editor(s)

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