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Proceedings Paper

Expert system diagnosis of CMOS VLSI fabrication problems
Author(s): Thomas E. Sullivan; Brian P. Butz; Robert J. Schuhl
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Paper Abstract

TEMPIC is a diagnostic expert system capable of providing process and device engineers with real time assistance in determining the origin of CMOS fabrication faults. The increased complexity of 1.25 and submicron CMOS processes presents the device engineer with large statistical data bases in which parametric relationships and dependencies must be analyzed and correlated. Corrective action is then initiated to remedy the identified process fault. The TEMPIC expert system functions as an advisor to the device engineer. Numerical data is gathered and is assigned qualitative descriptors with respect to the deviation of the experimental data from the process specification. Three related but independent data bases are used: Process control data, on-chip critical dimension data, and parametric electrical data. In this paper we discuss the knowledge engineering methodology used in developing the rules for the system and the way in which the system diagnostic architecture evolved from those sessions. The method by which the expert system determines candidate faults is presented. In cases where several possible faults are identified an interactive dialogue is initiated.

Paper Details

Date Published: 1 January 1990
PDF: 12 pages
Proc. SPIE 1293, Applications of Artificial Intelligence VIII, (1 January 1990); doi: 10.1117/12.21053
Show Author Affiliations
Thomas E. Sullivan, Temple Univ. (United States)
Brian P. Butz, Temple Univ. (United States)
Robert J. Schuhl, Temple Univ. (United States)

Published in SPIE Proceedings Vol. 1293:
Applications of Artificial Intelligence VIII
Mohan M. Trivedi, Editor(s)

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