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Proceedings Paper

MEMS for smart structures
Author(s): Mehran Mehregany; Christopher A. Bang
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Paper Abstract

This paper describes the use of MEMS in smart structures. A smart skin concept is described in which an array of sensors and actuators may be incorporated onto the surface of a structure. A hear flux sensor array concept is described, and shear stress sensors are presented as examples of MEMS devices for structure surfaces. MEMS devices may also be embedded into a structure. For example, pressure and temperature memory sensors are presented for a smart-tire application, in which the MEMS device may be embedded into the tire to provide tire-monitoring capabilities.

Paper Details

Date Published: 26 May 1995
PDF: 10 pages
Proc. SPIE 2448, Smart Structures and Materials 1995: Smart Electronics, (26 May 1995); doi: 10.1117/12.210453
Show Author Affiliations
Mehran Mehregany, Case Western Reserve Univ. (United States)
Christopher A. Bang, Advanced MicroMachines Inc. (United States)


Published in SPIE Proceedings Vol. 2448:
Smart Structures and Materials 1995: Smart Electronics
Vijay K. Varadan, Editor(s)

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