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Proceedings Paper

Design considerations for large MEMS
Author(s): Mohammed T.A. Saif; Noel C. MacDonald
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Paper Abstract

There has been an increasing need for the design and fabrication of large (few millimeters) MEMS made of micron-size features for a variety of applications. Mechanical design of large MEMS structures needs careful consideration of the forces developed during and after processing to ensure their survivability and reliable performance. forces generated to actuate a device, e.g., capacitive force, are well characterized. However, the forces developed due to conditions of processing, such as fluid forces, have not yet been fully characterized. In this paper, we propose simple models to estimate thermal and intrinsic stresses and the corresponding deformations of large MEMS, as well as fluid forces during wet processing. We also discuss the issue of stability of large MEMS during actuation.

Paper Details

Date Published: 26 May 1995
PDF: 12 pages
Proc. SPIE 2448, Smart Structures and Materials 1995: Smart Electronics, (26 May 1995); doi: 10.1117/12.210452
Show Author Affiliations
Mohammed T.A. Saif, Cornell Univ. (United States)
Noel C. MacDonald, Cornell Univ. (United States)

Published in SPIE Proceedings Vol. 2448:
Smart Structures and Materials 1995: Smart Electronics
Vijay K. Varadan, Editor(s)

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