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Proceedings Paper

Deposition and patterning of Tl-Ca-Ba-Cu-O superconducting thin films
Author(s): Gurunathan Subramanyam; Farhad Radpour; Vikram J. Kapoor; George H. Lemon
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Paper Abstract

High temperature superconducting Tl-Ca-Ba-Cu-0 thin films were sputter deposited from a single composite powder target on SrTiO3 and LaAlO3 substrates, in an rf magnetron sputtering system. The as-deposited thin films were sintered and annealed in an excess Tl partial pressure to obtain superconductivity. The superconducting films were characterized by scanning electron microscope (SEM), x-ray diffraction (XRD) and resistance vs temperature (R vs T) measurements. Fine line features as small as 25 jim were obtained in as-deposited thin films using standard photolithography and wet chemical etching in a weak acid. From the XRD and SEM results, the annealed thin films were found to be highly c-axis oriented, with smooth platelets of 2-10 pm in size. The R vs T measurements showed zero resistance at temepratures as high as 107 K on SrTiO3 and 103 K on LaA1O3.

Paper Details

Date Published: 1 October 1990
PDF: 8 pages
Proc. SPIE 1292, Superconductivity Applications for Infrared and Microwave Devices, (1 October 1990); doi: 10.1117/12.21045
Show Author Affiliations
Gurunathan Subramanyam, Univ. of Cincinnati (United States)
Farhad Radpour, Univ. of Cincinnati (United States)
Vikram J. Kapoor, Univ. of Cincinnati (United States)
George H. Lemon, Univ. of Cincinnati (United States)


Published in SPIE Proceedings Vol. 1292:
Superconductivity Applications for Infrared and Microwave Devices
Kul B. Bhasin; Vernon O. Heinen, Editor(s)

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