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Proceedings Paper

Spectroscopic characterization of molecular interactions between DNQ-PACs and phenolic resins using selectively nitrogen-15 labeled DNQs
Author(s): Marie Borzo; Joseph J. Rafalko; Monica Joe; Ralph R. Dammel; M. Dalil Rahman; Martine A. Ziliox
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Paper Abstract

Interactions between diazonaphthoquinone (DNQ)-photoactive compounds (PACs) and phenolic resins with different degrees of ortho, ortho-bonding have been investigated using solid state nitrogen-15 nuclear magnetic resonance (NMR) and vibrational (infrared and Raman) spectroscopic techniques. A specifically nitrogen-15 labeled PAC was synthesized to facilitate solid state nitrogen-15 NMR experimentation, and to resolve ambiguities in vibrational spectra. Comparison of vibrational spectra of the 15N-labeled PAC and its natural abundance 14N analog showed conclusively that Fermi resonance as well as hydrogen-boding resin-PAC interactions influence changes in the out-of-phase diazo stretching region near 2100 cm-1. Solid state nitrogen-15 NMR of the 15N-labeled PAC in poly(p-hydroxystyrene), in a m-cresol 3,5-xylenol novolak, and in a mainly m,p- cresol novolak showed the binding situation in the resins to be diffuse, but quite similar. Although the three resins examined are lithographically very different, the observed nitrogen- 15 shifts were small compared to the broadening of the resonances, and did not show major differences due to ortho, ortho-bonding effects.

Paper Details

Date Published: 9 June 1995
PDF: 11 pages
Proc. SPIE 2438, Advances in Resist Technology and Processing XII, (9 June 1995); doi: 10.1117/12.210350
Show Author Affiliations
Marie Borzo, Hoechst Celanese Corp. (United States)
Joseph J. Rafalko, Hoechst Celanese Corp. (United States)
Monica Joe, Hoechst Celanese Corp. (United States)
Ralph R. Dammel, Hoechst Celanese Corp. (United States)
M. Dalil Rahman, Hoechst Celanese Corp. (United States)
Martine A. Ziliox, Bruker Instruments, Inc. (United States)

Published in SPIE Proceedings Vol. 2438:
Advances in Resist Technology and Processing XII
Robert D. Allen, Editor(s)

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