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Proceedings Paper

Effect of molecular weight distribution on the dissolution properties of novolac blends
Author(s): Pavlos C. Tsiartas; Logan L. Simpson; Anwei Qin; C. Grant Willson; Robert D. Allen; Val J. Krukonis; Paula M. Gallagher-Wetmore
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Paper Abstract

The dissolution properties of nearly monodisperse fractions of metacresol novolac resin in aqueous potassium hydroxide solutions has been investigated. A relationship between the molecular weight of the fractions and dissolution rate was examined for a range of developer concentrations. Deliberate and calculated blending of the various fractions afforded an opportunity to investigate the fundamental relationship between molecular weight and dissolution characteristics over a range of developer concentrations.

Paper Details

Date Published: 9 June 1995
PDF: 11 pages
Proc. SPIE 2438, Advances in Resist Technology and Processing XII, (9 June 1995); doi: 10.1117/12.210347
Show Author Affiliations
Pavlos C. Tsiartas, Univ. of Texas/Austin (United States)
Logan L. Simpson, Univ. of Texas/Austin (United States)
Anwei Qin, Univ. of Texas/Austin (United States)
C. Grant Willson, Univ. of Texas/Austin (United States)
Robert D. Allen, IBM Almaden Research Ctr. (United States)
Val J. Krukonis, Phasex Corp. (United States)
Paula M. Gallagher-Wetmore, Phasex Corp. (United States)

Published in SPIE Proceedings Vol. 2438:
Advances in Resist Technology and Processing XII
Robert D. Allen, Editor(s)

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