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Proceedings Paper

In-situ integrated processing of high Tc superconductors and related materials by MOCVD for the fabrication of hybrid superconductor/semiconductor devices
Author(s): Rajendra Singh; Sanjai Sinha; J. T. C. Ng; N. J. Hsu
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Paper Abstract

Rapid isothermal processing and microwave-excited gases (N2O + O2 + He) have been used to deposit YBCO films on YSZ substrates. The thermal cycle represents the lowest thermal budget used by any other researcher. A Tc of 75 K was observed. These results coupled with the capability of depositing YBCO on BaF2/Si substrate indicate the usefulness of MOCVD for the practical realization of superconductor/semiconductor hybrid devices.

Paper Details

Date Published: 1 October 1990
PDF: 7 pages
Proc. SPIE 1292, Superconductivity Applications for Infrared and Microwave Devices, (1 October 1990); doi: 10.1117/12.21024
Show Author Affiliations
Rajendra Singh, Univ. of Oklahoma (United States)
Sanjai Sinha, Univ. of Oklahoma (United States)
J. T. C. Ng, Univ. of Oklahoma (United States)
N. J. Hsu, Univ. of Oklahoma (United States)

Published in SPIE Proceedings Vol. 1292:
Superconductivity Applications for Infrared and Microwave Devices
Kul B. Bhasin; Vernon O. Heinen, Editor(s)

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