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Proceedings Paper

Short-time investigation of deposition processes
Author(s): Thomas Witke; Peter Siemroth; Thomas Schuelke; B. Schultrich; Emil Ott
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Paper Abstract

The High Speed Framing Camera (HSFC) is a new high speed camera for investigations of processes in the ranges of nanoseconds and micrometers. This camera was designed especially for our studies of deposition processes. In pulsed laser deposition (PLD), vacuum arc deposition (VAD) and material deposition by channel spark the target material is evaporated and ionized in a fast process of some nanoseconds duration. New depositional applications require higher efficiency and modified plasma parameters. Therefore the processes of explosive plasma production must be studied with an adequate temporal and spatial resolution. The HSFC combines a microscopical resolution of 10 micrometers with a nanosecond time resolution and a very high optical sensitivity. Therefore a high resolution long-distance microscope QUESTAR is combined with a four channel intensifying CCD camera.

Paper Details

Date Published: 30 May 1995
PDF: 8 pages
Proc. SPIE 2513, 21st International Congress on: High-Speed Photography and Photonics, (30 May 1995); doi: 10.1117/12.209567
Show Author Affiliations
Thomas Witke, Fraunhofer Institute for Materials Physics and Surface Engineering (Germany)
Peter Siemroth, Fraunhofer Institute for Materials Physics and Surface Engineering (Germany)
Thomas Schuelke, Fraunhofer Institute for Materials Physics and Surface Engineering (Germany)
B. Schultrich, Fraunhofer Institute for Materials Physics and Surface Engineering (Germany)
Emil Ott, PCO Computer Optics GmbH (Germany)


Published in SPIE Proceedings Vol. 2513:
21st International Congress on: High-Speed Photography and Photonics
Ung Kim; Joon-Sung Chang; Seung-Han Park, Editor(s)

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