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Proceedings Paper

Broadband UV small-spot spectroscopic ellipsometer
Author(s): Timothy R. Piwonka-Corle; Torsten R. Kaack; K. F. Scoffone; Xing Chen; K. B. Malwankar; Mark E. Keefer; Lloyd J. LaComb; Jean-Louis P. Stehle; Jean-Philippe Piel; Dorian Zahorski; O. Thomas; Jean Pierre Rey; L. Escadafals
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Paper Abstract

The design of the world's first production worthy broadband ultra-violet and visible small spot spectroscopic ellipsometer is described. The instrument, called the Prometrix® UV125OSE, was developed by the Prometrix division of Tencor Instruments in cooperation with SOPRA S.A., a pioneer in the field of spectroscopic ellipsometry. It has the ability to measure both the thickness and refractive index of different layers on a wide variety of materials in multiple layer film stacks. In this paper the optical system will be reviewed and spot size data presented. We will further discuss some of the design considerations such as the angle of incidence and allowed spread of the collection beam. Data characterizing the precision and stability of the instrument is presented for a variety of films including SiO on silicon, and Si3N4 on silicon, and a multiple layer stack of SiO Ipoly-SiISiOon silicon. Keywords: spectroscopic ellipsometry, ultra-violet, thin films, measurements, index of refraction, silicon dioxide, silicon nitride, polysilicon

Paper Details

Date Published: 22 May 1995
PDF: 12 pages
Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); doi: 10.1117/12.209239
Show Author Affiliations
Timothy R. Piwonka-Corle, Tencor Instruments, Inc. (United States)
Torsten R. Kaack, Tencor Instruments, Inc. (United States)
K. F. Scoffone, Tencor Instruments, Inc. (United States)
Xing Chen, Tencor Instruments, Inc. (United States)
K. B. Malwankar, Tencor Instruments, Inc. (United States)
Mark E. Keefer, Tencor Instruments, Inc. (United States)
Lloyd J. LaComb, Tencor Instruments, Inc. (United States)
Jean-Louis P. Stehle, SOPRA SA (France)
Jean-Philippe Piel, SOPRA SA (France)
Dorian Zahorski, SOPRA SA (France)
O. Thomas, SOPRA SA (France)
Jean Pierre Rey, SOPRA SA (France)
L. Escadafals, SOPRA SA (France)

Published in SPIE Proceedings Vol. 2439:
Integrated Circuit Metrology, Inspection, and Process Control IX
Marylyn Hoy Bennett, Editor(s)

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