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Proceedings Paper

Deep-UV excimer laser measurements at NIST
Author(s): Rodney W. Leonhardt; Thomas R. Scott
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Paper Abstract

The National Institute of Standards and Technology has designed and built two electrically calibrated laser calorimeters as primary standards for absolute energy measurements at the wavelength of 248 nm. Under the sponsorship of SEMATECH, NIST developed the calorimeters to improve measurement of dose energy in excimer laser based microlithography. The calorimeter system can be used to calibrate transfer standards which in turn can be used to calibrate detectors employed for energy measurements of semiconductor wafer exposure. The excimer calorimeter uses a glass filter which functions as a volume absorber that allows collection of nanosecond pulses of laser radiation without suffering damage. The measurement range of the calorimeters is 0.3-25 J, but can be extended to 1 mJ with beamsplitters. Electrical calibration of the calorimeters shows a standard deviation in the calibration factor of less than 0.5% for entire energy range. The total uncertainty of typical power and energy meter calibrations is approximately 2%.

Paper Details

Date Published: 22 May 1995
PDF: 12 pages
Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); doi: 10.1117/12.209229
Show Author Affiliations
Rodney W. Leonhardt, National Institute of Standards and Technology (United States)
Thomas R. Scott, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 2439:
Integrated Circuit Metrology, Inspection, and Process Control IX
Marylyn Hoy Bennett, Editor(s)

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