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Proceedings Paper

Metrology with the ultraviolet scanning transmission microscope
Author(s): Richard M. Silver; James E. Potzick; J. Y-Chien Hu
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Paper Abstract

A novel design for an ultraviolet critical dimension measurement transmission microscope utilizing the Stewart platform as the rigid main structure has been implemented. This new design shows improved vibration characteristics and is able to accommodate large specimens. We present alignment procedures and their relevance to obtaining accurate linewidth measurements. Initial measurements with the new system comparing visible and ultraviolet wavelength illumination show expected characteristic dependence of the intensity image as a function of wavelength.

Paper Details

Date Published: 22 May 1995
PDF: 9 pages
Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); doi: 10.1117/12.209228
Show Author Affiliations
Richard M. Silver, National Institute of Standards and Technology (United States)
James E. Potzick, National Institute of Standards and Technology (United States)
J. Y-Chien Hu, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 2439:
Integrated Circuit Metrology, Inspection, and Process Control IX
Marylyn Hoy Bennett, Editor(s)

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