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Proceedings Paper

Automated CD measurements with the Hitachi S-6280
Author(s): Elizabeth E. Chain; Edward P. Baaklini
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Paper Abstract

The Hitachi Model S-6280 high resolution field emission Scanning Electron Microscope (SEM) is used at Motorola's MOS-12 facility for Critical Dimension (CD) measurements of less than 1 micrometer in size. This tool is used to measure 200-mm diameter wafers with a low accelerating voltage in the range 0.7-1.0 kV. During new process development the tool is run in both manual mode and in a fully automated mode utilizing patten recognition for global alignment as well as feature CD measurement. Results on the reproducibility of fully- automated measurements show that this technique provides a significantly improved measurement capability compared to the standard manual technique.

Paper Details

Date Published: 22 May 1995
PDF: 6 pages
Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); doi: 10.1117/12.209216
Show Author Affiliations
Elizabeth E. Chain, Motorola (United States)
Edward P. Baaklini, Motorola (United States)

Published in SPIE Proceedings Vol. 2439:
Integrated Circuit Metrology, Inspection, and Process Control IX
Marylyn Hoy Bennett, Editor(s)

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