Share Email Print
cover

Proceedings Paper

Error measure comparison of currently employed dose-modulation schemes for e-beam proximity effect control
Author(s): Martin C. Peckerar; Christie R. Marrian
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Standard matrix inversion methods of e-beam proximity correction are compared with a variety of pseudoinverse approaches based on gradient descent. It is shown that the gradient descent methods can be modified using 'regularizers' (terms added to the cost function minimized during gradient descent). This modification solves the 'negative dose' problem in a mathematically sound way. Different techniques are contrasted using a weighted error measure approach. It is shown that the regularization approach leads to the highest quality images. In some cases, ignoring negative doses yields results which are worse than employing an uncorrected dose file.

Paper Details

Date Published: 19 May 1995
PDF: 17 pages
Proc. SPIE 2437, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V, (19 May 1995); doi: 10.1117/12.209187
Show Author Affiliations
Martin C. Peckerar, Naval Research Lab. (United States)
Christie R. Marrian, Naval Research Lab. (United States)


Published in SPIE Proceedings Vol. 2437:
Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V
John M. Warlaumont, Editor(s)

© SPIE. Terms of Use
Back to Top