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Proceedings Paper

Planar-doped structures by atomic layer epitaxy
Author(s): Majid Hashemi; J. Ramdani; Brian McDermott; Kimberly G. Reid; John R. Hauser; Salah M. Bedair
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Paper Details

Date Published: 1 August 1990
PDF: 15 pages
Proc. SPIE 1288, High-Speed Electronics and Device Scaling, (1 August 1990); doi: 10.1117/12.20918
Show Author Affiliations
Majid Hashemi, North Carolina State Univ. (United States)
J. Ramdani, North Carolina State Univ. (United States)
Brian McDermott, North Carolina State Univ. (United States)
Kimberly G. Reid, North Carolina State Univ. (United States)
John R. Hauser, North Carolina State Univ. (United States)
Salah M. Bedair, North Carolina State Univ. (United States)


Published in SPIE Proceedings Vol. 1288:
High-Speed Electronics and Device Scaling
Lester Fuess Eastman, Editor(s)

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