Share Email Print
cover

Proceedings Paper

Testing high-performance galvanometer-based optical scanners
Author(s): Bruce E. Rohr
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

As the speed and accuracy requirements increase for Galvanometer based optical scanners so does the need for higher performance test equipment. This paper summarizes the practice and challenge of designing such instruments.

Paper Details

Date Published: 12 May 1995
PDF: 10 pages
Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); doi: 10.1117/12.209050
Show Author Affiliations
Bruce E. Rohr, Cambridge Technology Inc. (United States)


Published in SPIE Proceedings Vol. 2383:
Micro-Optics/Micromechanics and Laser Scanning and Shaping
M. Edward Motamedi; Leo Beiser, Editor(s)

© SPIE. Terms of Use
Back to Top