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Proceedings Paper

XY scan engine with microradian accuracy
Author(s): Jean I. Montagu; Herman DeWeerd; Peter Honkanen
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Paper Abstract

This paper analyzes the sources of error which shape the accuracy of a flat field raster scanning engine. It briefly describes the critical characteristics of the optical elements, scanners, electronics, laser, and structural design selected to build an engine with a system of accuracy of 0.35 micron, a 3.5 micron spot, and a telecentric work area of 25 mm diameter.

Paper Details

Date Published: 12 May 1995
PDF: 11 pages
Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); doi: 10.1117/12.209049
Show Author Affiliations
Jean I. Montagu, General Scanning, Inc. (United States)
Herman DeWeerd, General Scanning, Inc. (United States)
Peter Honkanen, General Scanning, Inc. (United States)


Published in SPIE Proceedings Vol. 2383:
Micro-Optics/Micromechanics and Laser Scanning and Shaping
M. Edward Motamedi; Leo Beiser, Editor(s)

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