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Proceedings Paper

Fabrication of refractive microlens arrays
Author(s): Haluk O. Sankur; M. Edward Motamedi; Randolph L. Hall; William J. Gunning; Mohsen Khoshnevisan
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Paper Abstract

Fabrication issues of microlens arrays, made by first forming photoresist microlenses, by patterning and reflowing photoresist islands under temperature, and then transferring this into the substrate by a dry etch process, were studied. Photoresist microlenses were reliably fabricated within a range of aspect ratios. The desired sag of the microlenses in the substrate was controllably achieved by adjusting the etch selectivity. Etching behavior of fused silica in mixtures of fluoroform with oxygen or sulfur hexafluoride was studied in detail. High quality microlens arrays were fabricated in fused silica, silicon and germanium, and selected lenses were characterized.

Paper Details

Date Published: 12 May 1995
PDF: 5 pages
Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); doi: 10.1117/12.209019
Show Author Affiliations
Haluk O. Sankur, Rockwell International Science Ctr. (United States)
M. Edward Motamedi, Rockwell International Science Ctr. (United States)
Randolph L. Hall, Rockwell International Science Ctr. (United States)
William J. Gunning, Rockwell International Science Ctr. (United States)
Mohsen Khoshnevisan, Rockwell International Science Ctr. (United States)


Published in SPIE Proceedings Vol. 2383:
Micro-Optics/Micromechanics and Laser Scanning and Shaping
M. Edward Motamedi; Leo Beiser, Editor(s)

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