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Proceedings Paper

Microfocusing optical device using piezoelectric thin-film actuator
Author(s): Hiroshi Goto; Shyuichi Wakabayashi; Masaaki Ikeda; Minoru Sakata; Koichi Imanaka; Masashi Takeuchi; Tsuneji Yada
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Paper Abstract

A novel micro focusing optical device controlled by a piezoelectric thin film micro actuator has been presented. This device is provided by bonding two micromachined substrates, which are a glass substrate integrated with a surface emitting light element and a micro Fresnel lens on each surface, and a silicon substrate with a diaphragm type of piezoelectric thin film actuator on it. The surface of the thin film is used as a movable reflection mirror. Focusing is performed by changing position of the mirror surface along the optical axis. In the case of applying the micro lens with 1.3 mm of diameter and 0.33 of N.A. to this focusing device and the thin film actuator capable of several micron displacement, focal point shifting of over 100 mm is obtained. Applying the device to optical senors such as a barcode reader, miniaturization of the light source and high resolution detecting for wide range could be possible.

Paper Details

Date Published: 12 May 1995
PDF: 8 pages
Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); doi: 10.1117/12.209015
Show Author Affiliations
Hiroshi Goto, Omron Corp. (Japan)
Shyuichi Wakabayashi, Omron Corp. (Japan)
Masaaki Ikeda, Omron Corp. (Japan)
Minoru Sakata, Omron Corp. (Japan)
Koichi Imanaka, Omron Corp. (Japan)
Masashi Takeuchi, Omron Corp. (Japan)
Tsuneji Yada, Omron Corp. (Japan)

Published in SPIE Proceedings Vol. 2383:
Micro-Optics/Micromechanics and Laser Scanning and Shaping
M. Edward Motamedi; Leo Beiser, Editor(s)

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