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Proceedings Paper

Two-dimensional silicon micromachined optical scanner integrated with a photodetector
Author(s): Masaaki Ikeda; Hiroshi Goto; Minoru Sakata; Shyuichi Wakabayashi; Koichi Imanaka; Masashi Takeuchi; Tsuneji Yada
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Paper Abstract

A highly miniaturized optical scanner integrated with a photo detector has been developed for miniaturization of scanning type of optical sensors. The scanner is fabricated by silicon micromachining technologies and is driven by a piezoelectric actuator. It is capable of two dimensional scanning and photo detection. The scanning angle is over 40 deg X 30 deg and the photo detecting sensitivity is 0.49 A/W for 680 nm wavelength light.

Paper Details

Date Published: 12 May 1995
PDF: 7 pages
Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); doi: 10.1117/12.209013
Show Author Affiliations
Masaaki Ikeda, Omron Corp. (Japan)
Hiroshi Goto, Omron Corp. (Japan)
Minoru Sakata, Omron Corp. (Japan)
Shyuichi Wakabayashi, Omron Corp. (Japan)
Koichi Imanaka, Omron Corp. (Japan)
Masashi Takeuchi, Omron Corp. (Japan)
Tsuneji Yada, Omron Corp. (Japan)


Published in SPIE Proceedings Vol. 2383:
Micro-Optics/Micromechanics and Laser Scanning and Shaping
M. Edward Motamedi; Leo Beiser, Editor(s)

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