Share Email Print
cover

Proceedings Paper

Precision and performance of polysilicon micromirrors for hybrid integrated optics
Author(s): Olav Solgaard; Norman C. Tien; Michael J. Daneman; Meng-Hsiung Kiang; Alois Friedberger; Richard S. Muller; Kam Y. Lau
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We have designed and built integrated, movable micromirrors for on-chip alignment in silicon- optical-bench technology. The mirrors are fabricated using surface micromachining with three polysilicon layers. A polysilicon-hinge technology was used to achieve the required vertical dimensions and functionality for alignment in hybrid photonic integrated circuits. The positioning accuracy of the mirrors is measured to be on the order of 0.2 micrometers . This precision is shown theoretically and experimentally to be sufficient for laser-to-fiber coupling. In the experimental verification, we used external actuators to position the micromirror and obtained 45% coupling efficiency from a semiconductor laser (operating at 1.3 micrometers ) to a standard single-mode optical fiber. The stability and robustness of the micromirrors were demonstrated in shock and vibration tests that showed that the micromirrors will withstand normal handling and operation without the need for welding or gluing. This micromirror technology combines the low-cost advantage of passive alignment and the accuracy of active alignment. In addition to optoelectronic packaging, the micromirrors can be expected to find applications in grating-tuned external-cavity lasers, scanning lasers, and interferometers.

Paper Details

Date Published: 12 May 1995
PDF: 11 pages
Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); doi: 10.1117/12.209011
Show Author Affiliations
Olav Solgaard, Univ. of California/Berkeley (United States)
Norman C. Tien, Univ. of California/Berkeley (United States)
Michael J. Daneman, Univ. of California/Berkeley (United States)
Meng-Hsiung Kiang, Univ. of California/Berkeley (United States)
Alois Friedberger, Univ. of California/Berkeley (United States)
Richard S. Muller, Univ. of California/Berkeley (United States)
Kam Y. Lau, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 2383:
Micro-Optics/Micromechanics and Laser Scanning and Shaping
M. Edward Motamedi; Leo Beiser, Editor(s)

© SPIE. Terms of Use
Back to Top