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Proceedings Paper

Fabrication and patterning of Tl-Ca-Ba-Cu-O superconducting thin films on LaAlO3 substrates
Author(s): Gurunathan Subramanyam; Farhad Radpour; Vikram J. Kapoor; George H. Lemon
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Paper Abstract

High critical transition temperature (high Tc) superconducting thin films of Tl-Ca-Ba-Cu-O (TlCaBaCuO) were fabricated on LaAlO3 substrates in an rf magnetron sputtering system. As-deposited thin films were sintered and annealed in a thallium rich ambient to obtain superconductivity with a zero resistance critical temperature (Tc) at 103 K. X-ray diffraction (XRD) results showed that the thin films were highly c-axis oriented with both Tl2Ca2Ba2Cu3O (2223) and Tl2CalBa2Cu2Ox (2122) phases present. A wet chemical etching process was used for patterning the as-deposited TlCaBaCuO thin films. Linewidths as small as 25 m were patterned using standard photolithography and wet chemical etching techniques. A ring resonator designed for a center frequency of 30 GHz has been fabricated.

Paper Details

Date Published: 1 October 1990
PDF: 8 pages
Proc. SPIE 1287, High Tc Superconductivity: Thin Films and Applications, (1 October 1990); doi: 10.1117/12.20891
Show Author Affiliations
Gurunathan Subramanyam, Univ. of Cincinnati (United States)
Farhad Radpour, Univ. of Cincinnati (United States)
Vikram J. Kapoor, Univ. of Cincinnati (United States)
George H. Lemon, Univ. of Cincinnati (United States)


Published in SPIE Proceedings Vol. 1287:
High Tc Superconductivity: Thin Films and Applications
Cheng-Chung John Chi; R. Bruce van Dover, Editor(s)

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