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Proceedings Paper

Preparation and high-frequency properties of high Tc superconducting thin films
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Paper Abstract

Single target in situ sputter deposition using 9O off-axis geometry has made it possible to study various physical properties of superconducting films of YBaCu3O'x under well controlled conditions. The superconducting DC and high frequency properties, and the normal state properties can all be optimized under conditions which do not necessarily produce the highest Tc's. Surface resistances at 4.2 K and 10 GHz are reproducibly less than 20 iQ. Correlations between the processing parameters, DC properties, microstructures and high frequency properties of these films as they are presently known are summarized.

Paper Details

Date Published: 1 October 1990
PDF: 8 pages
Proc. SPIE 1287, High Tc Superconductivity: Thin Films and Applications, (1 October 1990); doi: 10.1117/12.20890
Show Author Affiliations
Chang-Beom Eom, Stanford Univ. (United States)
Theodore H. Geballe, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 1287:
High Tc Superconductivity: Thin Films and Applications
Cheng-Chung John Chi; R. Bruce van Dover, Editor(s)

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