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Proceedings Paper

Preparation of high Tc YBa2Cu3O7-x thin films
Author(s): Mark S. DiIorio
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Paper Abstract

The various deposition processes for preparing high-T superconducting thin flints are compared. The focus is on both the key film properties produced by each technique as well as the advantages and disadvantages of the specific deposition process. Emphasis is placed on the issues relating to film manufacturability and consequently centers on the YBaCu3O7 superconductor. Innovative solutions allowing in-situ fabrication of thin films are also covered along with the leading post-anneal processes. The specific techniques examined include sputtering (single-target and multi-target), electron-beam co-evaporation, MBE, laser ablation, ion-beam deposition, and CVD.

Paper Details

Date Published: 1 October 1990
PDF: 14 pages
Proc. SPIE 1287, High Tc Superconductivity: Thin Films and Applications, (1 October 1990); doi: 10.1117/12.20877
Show Author Affiliations
Mark S. DiIorio, Biomagnetic Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 1287:
High Tc Superconductivity: Thin Films and Applications
Cheng-Chung John Chi; R. Bruce van Dover, Editor(s)

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