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Proceedings Paper

Photoreflectance surface characterization of InP:Fe substrates
Author(s): Alok K. Berry; D. Kurt Gaskill; N. Bottka
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Paper Abstract

Photoreflectance (PR) was used to determine the surface damage caused by polishing on semi-insulating lnP:Fe substrates. PR measurements were performed between subsequent etching steps. The PR results on substrates, obtained from various vendors and laboratories, indicate that the exciton structure near the fundamental absorption edge transition is very sensitive to surface imperfections and the bulk resistivity of the substrates.

Paper Details

Date Published: 1 August 1990
PDF: 8 pages
Proc. SPIE 1286, Modulation Spectroscopy, (1 August 1990); doi: 10.1117/12.20873
Show Author Affiliations
Alok K. Berry, George Mason Univ. (United States)
D. Kurt Gaskill, Naval Research Lab. (United States)
N. Bottka, Naval Research Lab. (United States)

Published in SPIE Proceedings Vol. 1286:
Modulation Spectroscopy
Fred H. Pollak; Manuel Cardona; David E. Aspnes, Editor(s)

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