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Proceedings Paper

Preparation of coatings with low roughness by high-current impulse magnetron discharge
Author(s): Andrey V. Kaziev; Ivan A. Shchelkanov; Georgy V. Khodachenko
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Paper Abstract

The contribution reports the experimental results of preparation of thin metal films (nickel, aluminum) with low surface roughness using high-current impulse magnetron discharge plasma. The coatings were deposited on silica and silicon surfaces. It was found that by applying a certain negative bias voltage to the substrate, one can stimulate the smoothing of the surface topology. For the case of nickel deposition the average surface roughness decreased from about 8 nm to about 2 nm. The discussion of experimental data acquired under different deposition conditions is presented. The results allow us to single out the main factors influencing the surface roughness of the films and to suggest an analytical condition for smoothing process.

Paper Details

Date Published: 7 January 2015
PDF: 5 pages
Proc. SPIE 9442, Optics and Measurement Conference 2014, 94420J (7 January 2015); doi: 10.1117/12.2086913
Show Author Affiliations
Andrey V. Kaziev, National Research Nuclear Univ. MEPhI (Russian Federation)
Ivan A. Shchelkanov, Univ. of Illinois at Urbana-Champaign (United States)
Georgy V. Khodachenko, National Research Nuclear Univ. MEPhI (Russian Federation)

Published in SPIE Proceedings Vol. 9442:
Optics and Measurement Conference 2014
Jana Kovačičinová; Tomáš Vít, Editor(s)

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