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Proceedings Paper

Dispersive and BEMA investigation on optical properties of photovoltaic thin films
Author(s): Jarmila Müllerová; Pavol Šutta; Lucie Prušáková; Marie Netrvalová
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Paper Abstract

The paper reports results obtained from optical spectrophotometry complemented with data from FTIR, Raman scattering and XRD measurements to characterize hydrogenated silicon (Si:H) thin films deposited by PECVD deposition from silane – argon plasma diluted with hydrogen. The dispersive optical properties and microstructure have been determined as a function of the hydrogen dilution which has been found to result in an inhomogeneous growth during which the material evolves from amorphous Si:H to microcrystalline Si:H. Porosity originating from microvoids has been discovered and calculated using effective medium approximations. Bruggeman effective medium approximation (BEMA) has been used to calculate volume fractions of microvoids and amorphous and crystalline phase.

Paper Details

Date Published: 5 December 2014
PDF: 7 pages
Proc. SPIE 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 94411J (5 December 2014); doi: 10.1117/12.2086805
Show Author Affiliations
Jarmila Müllerová, Univ. of Žilina (Slovakia)
Pavol Šutta, Univ. of West Bohemia (Czech Republic)
Lucie Prušáková, Univ. of West Bohemia (Czech Republic)
Marie Netrvalová, Univ. of West Bohemia (Czech Republic)


Published in SPIE Proceedings Vol. 9441:
19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Agnieszka Popiolek-Masajada; Waclaw Urbanczyk, Editor(s)

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