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Proceedings Paper

Advanced interferometry systems for dimensional measurement in nanometrology
Author(s): Josef Lazar; Miroslava Hola; Jan Hrabina; Jindřich Oulehla; Ondřej Číp; Miloslav Vychodil; Petra Sedlář; Milan Provazník
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Paper Abstract

We report on the results of the common collaborative project of applied research where the Institute of Scientific Instruments (ISI) of the Academy of Sciences of the Czech Republic and a company Meopta - optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta – optika.

The main aim of the project is a design of a complex interferometric measuring system in a form of a prototype serving as a master for further production. It concept is a modular family of components configurable for various arrangements primarily for multi-axis measurements in nanotechnology and surface inspection. Within this project we developed a compact, solid-state frequency stabilized laser referenced to iodine transitions and technology of iodine cells for laser frequency stabilization. A fundamental setup of the laser interferometer has been arranged and tested. The company Meopta – optika contributes with development of new technology together with a design of a machine for processing and polishing of high-precision flat-surface optical components.


Paper Details

Date Published: 7 January 2015
PDF: 6 pages
Proc. SPIE 9442, Optics and Measurement Conference 2014, 94420P (7 January 2015); doi: 10.1117/12.2086613
Show Author Affiliations
Josef Lazar, Institute of Scientific Instruments of the AS CR, v.v.i. (Czech Republic)
Miroslava Hola, Institute of Scientific Instruments of the AS CR, v.v.i. (Czech Republic)
Jan Hrabina, Institute of Scientific Instruments of the AS CR, v.v.i. (Czech Republic)
Jindřich Oulehla, Institute of Scientific Instruments of the AS CR, v.v.i. (Czech Republic)
Ondřej Číp, Institute of Scientific Instruments of the AS CR, v.v.i. (Czech Republic)
Miloslav Vychodil, Meopta - optika, s.r.o. (Czech Republic)
Petra Sedlář, Meopta - optika, s.r.o. (Czech Republic)
Milan Provazník, Meopta - optika, s.r.o. (Czech Republic)


Published in SPIE Proceedings Vol. 9442:
Optics and Measurement Conference 2014
Jana Kovačičinová; Tomáš Vít, Editor(s)

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