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Proceedings Paper

Surface energy control for contact hole shrinkage using DSA
Author(s): Kuan-Hsin Lo; Chieh-Han Wu; Ching-Yu Chang; Chung-Ju Lee; John Lin
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Paper Details

Date Published:
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Proc. SPIE 9423, Alternative Lithographic Technologies VII, 94232B; doi: 10.1117/12.2086351
Show Author Affiliations
Kuan-Hsin Lo, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
Chieh-Han Wu, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
Ching-Yu Chang, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
Chung-Ju Lee, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
John Lin, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)


Published in SPIE Proceedings Vol. 9423:
Alternative Lithographic Technologies VII
Douglas J. Resnick; Christopher Bencher, Editor(s)

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