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Proceedings Paper

Nanomechanical properties of solvent cast PS and PMMA polymer blends and block co-polymers
Author(s): Matteo Lorenzoni; Laura Evangelio; Célia Nicolet; Christophe Navarro; Alvaro San Paulo; Francesc Perez Murano
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Paper Abstract

The nanomechanical properties of solvent cast polymer thin films have been investigated using PeakForceTM quantitative nanomechanical mapping. The samples consisted in films of polystyrene and poly(methyl methacrylate) obtained after dewetting of toluene solution on a polymeric brush layer. As a second step, we have probed the mechanical properties of Poly(styrenen- methilmethacrylate) (PS-b-PMMA) block co-polymers (BCP) thin films randomly oriented. The measured films has a critical thickness below 50 nm and present features to be resolved of less than 42 nm. Measured surface elastic modulus obtained present a good agreement with previous literature and show how PeakForce technique could be crucial to BCP investigation predicting the mechanical stability of the different phases.

Paper Details

Date Published: 27 March 2015
PDF: 10 pages
Proc. SPIE 9423, Alternative Lithographic Technologies VII, 942325 (27 March 2015); doi: 10.1117/12.2085829
Show Author Affiliations
Matteo Lorenzoni, Ctr. Nacional de Microelectrónica (Spain)
Laura Evangelio, Ctr. Nacional de Microelectrónica (Spain)
Célia Nicolet, Arkema S.A. (France)
Christophe Navarro, Arkema S.A. (France)
Alvaro San Paulo, Instituto de Mircoelectronica de Madrid (Spain)
Francesc Perez Murano, Ctr. Nacional de Microelectrónica (Spain)

Published in SPIE Proceedings Vol. 9423:
Alternative Lithographic Technologies VII
Douglas J. Resnick; Christopher Bencher, Editor(s)

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