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Proceedings Paper

Blending approaches to enhance structural order in block-copolymer's self-assemblies
Author(s): X. Chevalier; C. Nicolet; A. Gharbi; P. Pimenta-Barros; R. Tiron; G. Fleury; G. Hadziioannou; I. Iliopoulos; C. Navarro
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Paper Abstract

Various blends approaches based on PS-b-PMMA block-copolymers (BCP) systems are studied. The impacts of the different components in the blends on various basic characteristics of interest for lithographic applications are highlighted. More specifically, we show how such approaches can be managed to get a tight control over the different dimensions of the self-assembly, and reach lower defects levels than a single pure BCP. These methods could greatly help the BCP self-assembly technology to be introduced as an actual lithographic technic to further reduce achievable dimensions.

Paper Details

Date Published: 20 March 2015
PDF: 11 pages
Proc. SPIE 9425, Advances in Patterning Materials and Processes XXXII, 94251N (20 March 2015); doi: 10.1117/12.2085821
Show Author Affiliations
X. Chevalier, Arkema France (France)
C. Nicolet, Arkema France (France)
A. Gharbi, CEA-LETI Minatec (France)
P. Pimenta-Barros, CEA-LETI Minatec (France)
R. Tiron, CEA-LETI Minatec (France)
G. Fleury, LCPO, Univ. Bordeaux 1, CNRS (France)
G. Hadziioannou, LCPO, Univ. Bordeaux 1, CNRS (France)
I. Iliopoulos, Arkema France (France)
C. Navarro, Arkema France (France)

Published in SPIE Proceedings Vol. 9425:
Advances in Patterning Materials and Processes XXXII
Thomas I. Wallow; Christoph K. Hohle, Editor(s)

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