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Proceedings Paper

Overlay and edge placement control strategies for the 7nm node using EUV and ArF lithography
Author(s): Jan Mulkens; Michael Hanna; Hannah Wei; Vidya Vaenkatesan; Henry Megens; Daan Slotboom
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Paper Abstract

In this paper we discuss edge placement error (EPE) for multi-patterning application and compare the EPE budget with the one for EUV single expose application case. These two patterning methods are candidate for the manufacturing of 10-nm and 7-nm logic semiconductor devices. EUV will enable 2D random pattern layout, while in the multi-patterning case a more restricted 1D design layout is needed. For the 1D design approach we discuss the patterning control spacer pitch division resulting in complex multi-layer alignment and EPE optimization strategies. Solutions include overlay and CD metrology based on angle resolved scatterometry, scanner actuator control to enable high order overlay corrections and computational lithography optimization to minimize imaging induced pattern placement errors of devices and metrology targets. We use 10-nm node experimental data and extrapolate the error budgets towards the 7-nm technology node. The experimental data will be based on NXE:3300B and NXT:1960Bi/NXT:1970Ci exposure systems. The results are compared to the more straightforward alternative of using single expose patterning with EUV for all critical layers.

Paper Details

Date Published: 13 March 2015
PDF: 13 pages
Proc. SPIE 9422, Extreme Ultraviolet (EUV) Lithography VI, 94221Q (13 March 2015); doi: 10.1117/12.2085761
Show Author Affiliations
Jan Mulkens, ASML Netherlands B.V. (Netherlands)
Michael Hanna, ASML Netherlands B.V. (Netherlands)
Hannah Wei, ASML Netherlands BV (Netherlands)
Vidya Vaenkatesan, ASML Netherlands BV (Netherlands)
Henry Megens, ASML Netherlands B.V. (Netherlands)
Daan Slotboom, ASML Netherlands B.V. (Netherlands)

Published in SPIE Proceedings Vol. 9422:
Extreme Ultraviolet (EUV) Lithography VI
Obert R. Wood; Eric M. Panning, Editor(s)

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