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Proceedings Paper

High speed electromechanical response of ionic microactuators
Author(s): Ali Maziz; Cedric Plesse; Caroline Soyer; Eric Cattan; Frederic Vidal
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Paper Abstract

This paper presents the synthesis and characterization of thin and ultra-fast conducting polymer microactuators which can operate in the open air. Compared to all previous existing electronic conducting polymer based microactuators, this approach deals with the synthesis of robust interpenetrating polymer networks (IPNs) combined with a spincoating technique in order to tune and drastically reduce the thickness of conducting IPN microactuators using a so-called “trilayer” configuration. Patterning of electroactive materials has been performed with existing technologies, such as standard photolithography and dry etching. The smallest air-operating microbeam actuator based on conducting polymer is then described with dimensions as low as 160x30x6 μm3. Under electrical stimulation the translations of small ion motion into bending deformations are used as tools to demonstrate that small ion vibrations can still occur at frequency as several hundreds of Hz. Conducting IPN microactuators are then promising candidates to develop new MEMS combining downscaling, softness, low driving voltage, and fast response speed.

Paper Details

Date Published: 1 April 2015
PDF: 8 pages
Proc. SPIE 9430, Electroactive Polymer Actuators and Devices (EAPAD) 2015, 94300O (1 April 2015); doi: 10.1117/12.2085516
Show Author Affiliations
Ali Maziz, Lab. LPPI, Institut des Matriaux (France)
Cedric Plesse, Lab. LPPI, Institut des Materiaux (France)
Caroline Soyer, IEMN, Univ. de Valenciennes et du Hainaut-Cambrésis (France)
Eric Cattan, IEMN, Univ. de Valenciennes et du Hainaut-Cambrésis (France)
Frederic Vidal, Lab. LPPI, Institut des Materiaux (France)


Published in SPIE Proceedings Vol. 9430:
Electroactive Polymer Actuators and Devices (EAPAD) 2015
Yoseph Bar-Cohen, Editor(s)

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