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Proceedings Paper

Millisecond laser annealing of sub-10nm directed self-assembly of PS-b-PDMS
Author(s): Jing Jiang; Brandon M. Wenning; Clemens C. Liedel; Michael O. Thompson; Christopher K. Ober
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Paper Details

Date Published:
Proc. SPIE 9425, Advances in Patterning Materials and Processes XXXII, 942511; doi: 10.1117/12.2084874
Show Author Affiliations
Jing Jiang, Cornell Univ. (United States)
Brandon M. Wenning, Cornell Univ. (United States)
Clemens C. Liedel, Cornell Univ. (United States)
Michael O. Thompson, Cornell Univ. (United States)
Christopher K. Ober, Cornell Univ. (United States)

Published in SPIE Proceedings Vol. 9425:
Advances in Patterning Materials and Processes XXXII
Thomas I. Wallow; Christoph K. Hohle, Editor(s)

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