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Proceedings Paper

Modeling and simulation of the beam steering unit
Author(s): Jiayun Feng; Xiaoping Li; Xin He; Jinchun Wang
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Paper Abstract

Production lithography is undergoing a technology shift, and the requirements of beam delivery system (BDS) are increasing which also raises the precision requirements of the beam steering units (BSU) in BDS. In essence, the BSU is a two rotational degree of freedom platform. In this paper, a BSU based on 3-RPS flexure parallel mechanism is proposed. By analyzing the relationship between the unit’s dimensions and mechanics, a mathematical model is built. Then the BSU with a balance between lower stress of the flexure hinges and higher accuracy of the unit can be got by optimizing the dimensions with the mathematical model. Finally a simulation is conducted to verify the design.

Paper Details

Date Published: 18 March 2015
PDF: 7 pages
Proc. SPIE 9426, Optical Microlithography XXVIII, 942623 (18 March 2015); doi: 10.1117/12.2084588
Show Author Affiliations
Jiayun Feng, Huazhong Univ. of Science and Technology (China)
Xiaoping Li, Huazhong Univ. of Science and Technology (China)
Xin He, Huazhong Univ. of Science and Technology (China)
Jinchun Wang, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 9426:
Optical Microlithography XXVIII
Kafai Lai; Andreas Erdmann, Editor(s)

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