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Proceedings Paper

Gravity induced deflection of a reference plate and tested plane surfaces and its influence on optical measurement with the Fizeau interferometer
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Paper Abstract

The paper presents an analysis of deflection of a reference plate and a tested plane parallel plate due to gravity during measurement with the Fizeau interferometer. Detailed expressions for the calculation of a deflection assuming different supports are presented. Furthermore, the relations for the calculation of a minimum thickness of a reference plate of the interferometer ensuring the required accuracy of measurement are given as well.

Paper Details

Date Published: 7 January 2015
PDF: 12 pages
Proc. SPIE 9442, Optics and Measurement Conference 2014, 944210 (7 January 2015); doi: 10.1117/12.2083898
Show Author Affiliations
Petr Pokorný, Czech Technical Univ. in Prague (Czech Republic)
Antonin Miks, Czech Technical Univ. in Prague (Czech Republic)
Pavel Novák, Czech Technical Univ. in Prague (Czech Republic)


Published in SPIE Proceedings Vol. 9442:
Optics and Measurement Conference 2014
Jana Kovačičinová; Tomáš Vít, Editor(s)

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