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Proceedings Paper

Discussion of modulation mechanisms in electron-beam electroreflectance and comparison to alternative modulation techniques
Author(s): Michael H. Herman
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Paper Abstract

Electron Beam Electroreflectance (EBER), a low power-density form of cathodoreflectance, has been investigated for use in a wide variety of potential applications. Herein, we describe a phenomenological theory of EBER and provide experimental support for the inherent electroreflectance and thermoreflectance mechanisms. In addition to pair generation and heating proposed earlier, a new mechanism, electron charging of the surface, is identified from the 2f EBER signal of P-type semiconductors. Finally, we compare the potential advantages of EBER to those of photoreflectance.

Paper Details

Date Published: 1 August 1990
PDF: 11 pages
Proc. SPIE 1286, Modulation Spectroscopy, (1 August 1990); doi: 10.1117/12.20835
Show Author Affiliations
Michael H. Herman, Charles Evans & Associates (United States)

Published in SPIE Proceedings Vol. 1286:
Modulation Spectroscopy
Fred H. Pollak; Manuel Cardona; David E. Aspnes, Editor(s)

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